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Technical Program Committee
Technical Program Chair
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| Martin Schmidt | Massachusetts Institute of Technology, USA
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| Technical Program Vice Chairs |
| Long-Sheng Fan | National Tsinghua University, TAIWAN |
| Göran Stemme | Royal Institute of Technology, SWEDEN
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| Executive Program Committee |
| Chong Ahn | University of Cincinnati, USA |
| Karl Böhringer | University of Washington, USA |
| Siebe Bouwstra | MEMS TC, THE NETHERLANDS |
| Jong-Uk Bu | SenPlus, REPUBLIC OF KOREA |
| Young-Ho Cho | KAIST, REPUBLIC OF KOREA |
| Long-Sheng Fan | National Tsinghua University, TAIWAN |
| Weileun Fang | National Tsinghua University, TAIWAN |
| Hiroyuki Fujita | University of Tokyo, JAPAN |
| Christofer Hierold | ETH Zürich, SWITZERLAND |
| Jack Judy | University of California at Los Angeles, USA |
| Jörg Kutter | Technical University of Denmark, DENMARK |
| Laurie Locascio | National Institute of Standards and Technology (NIST), USA |
| Joan R. Morante | Univeristy of Barecelona, SPAIN |
| Clark T.-C Nguyen | University of California, Berkeley, USA |
| Lina Sarro | Delft University of Technology, THE NETHERLANDS |
| Martin Schmidt | Massachusetts Institute of Technology, USA |
| Helmut Seidel | University of Saarland, GERMANY |
| Shuichi Shoji | Waseda University, JAPAN |
| Olav Solgaard | Stanford University, USA |
| Göran Stemme | Royal Institute of Technology (KTH), SWEDEN |
| Harrie A.C. Tilmans | IMEC, BELGIUM |
| Kimberly L. Turner | University of California, Santa Barbara, USA |
| Man Wong | Hong Kong University of Science & Technology, HONG KONG |
| Shanhong Xia | Chinese Academy of Sciences, CHINA
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| Technical Program Committee |
| Tayfun Akin | Middle East Technical University, Turkey |
| David Arnold | University of Florida, USA |
| Rashid Bashir | University of Illinois, Urbana-Champaign, USA |
| Anja Boisen | Technical University of Denmark, DENMARK |
| Juergen Brugger | Ecole Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND |
| Lionel Buchaillot | University of Lille, France |
| Rob Candler | Bosch LLC, USA |
| Pei-Zen Chang | National Taiwan University, TAIWAN |
| Karen Cheung | University of British Columbia, CANADA |
| Michel Despont | IBM Research Laboratory, SWITZERLAND |
| Jens Ducree | Dublin City University, IRELAND |
| David Elata | Technion- Israel Institute of Technology, ISRAEL |
| Masayoshi Esashi | Tohoku University, JAPAN |
| Gary Fedder | Carnegie Mellon University, USA |
| Alissa Fitzgerald | A.M. Fitzgerald & Associates, LLC, USA |
| Sami Franssila | Helsinki University of Technology, FINLAND |
| Luc Frechette | Université de Sherbrooke, CANADA |
| Paddy French | Delft University of Technology, NETHERLANDS |
| Han Gardeniers | University of Twente, NETHERLANDS |
| Udo-Martin Gómez | Robert Bosch GmbH, GERMANY |
| Yael Hanein | Tel Aviv University, ISRAEL |
| Yi-Long Hao | Peking University, CHINA |
| Gilbert Hawkins | Eastman Kodak Company, USA |
| Storrs Hoen | Agilent, USA |
| David Horsley | University of California, Davis, USA |
| Michael Huff | MEMS Exchange, USA |
| Qing-An Huang | Southeast University, CHINA |
| Mike Judy | Analog Devices, USA |
| CJ Kim | University of California, Los Angeles, USA |
| Yongkweon Kim | Seoul National University, KOREA |
| Satoshi Konishi | Ritsumeikan University, JAPAN |
| Chee W. Kwok | University of New South Wales, AUSTRALIA |
| Abraham Lee | University of California, Irvine, USA |
| Gwo-Bin Lee | National Cheng Kung University, TAIWAN |
| Luke Lee | University of California, Berkeley, USA |
| Yikuen Lee | Hong Kong University of Science and Technology, HONG KONG |
| Xinxin Li | Chinese Academy of Sciences, CHINA |
| Michel Maharbiz | University of California, Berkeley, USA |
| Ellis Meng | University of Southern California, USA |
| Jianmin Miao | Nanyang Technological University, SINGAPORE |
| Wilfried Mokwa | RWTH Aachen, GERMANY |
| Hiroaki Nakanishi | Shimadzu Corporation, JAPAN |
| Hyo-Jin Nam | LG Electronics, KOREA |
| Fredrik Nikolajeff | Uppsala University, SWEDEN |
| Joachim Oberhammer | Royal Institute of Technology, SWEDEN |
| Yongsoo Oh | Samsung Electro-Mechanics Corporation, KOREA |
| Wouter Olthuis | Universite of Twente, NETHERLANDS |
| Takahito Ono | Tohoku University, JAPAN |
| Je-Kyun Park | Korea Advanced Institute of Science and Technology, KOREA |
| Sumitha Pennathur | University of California, Santa Barbara, USA |
| Beth Pruitt | Stanford University, USA |
| Robert Puers | Katholieke Universiteit Leuven, BELGIUM |
| Kazuo Sato | Nagoya University, JAPAN |
| Kazuaki Sawada | Toyohashi University of Technology, JAPAN |
| Uwe Schnakenberg | RWTH Aachen, Germany |
| Mark Shannon | University of Illinois, Urbana-Champaign, USA |
| Isao Shimoyama | University of Tokyo, JAPAN |
| Andrei Shkel | University of California, Irvine, USA |
| Joe Simonson | Sandia National Laboratories, USA |
| Yuji Suzuki | University of Tokyo, JAPAN |
| Richard Syms | Imperial College London, UK |
| Osamu Tabata | Kyoto University, Japan |
| Joseph Talghader | University of Minnesota, USA |
| Hiroshi Toshiyoshi | University of Tokyo, Japan |
| Michiel Vellekoop | Vienna University of Technology, AUSTRIA |
| Sabeth Verpoorte | University of Groningen, NETHERLANDS |
| Joel Voldman | Massachusetts Institute of Technology, USA |
| Eric Yeatman | Imperial College London, UK |
| Jun-Bo Yoon | Korea Advanced Institute of Science and Technology, KOREA |
| Hans Zappe | University of Freiburg, GERMANY |
| Roland Zengerle | University of Freiburg-IMTEK, GERMANY |
| Zhaoying Zhou | Tsinghua University, CHINA
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